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『簡體書』芯片制造——半导体工艺制程实用教程(第六版)(英文版)

書城自編碼: 3503532
分類: 簡體書→大陸圖書→教材研究生/本科/专科教材
作者: Peter Van,Zant[彼得·范·赞特]Peter V
國際書號(ISBN): 9787121243783
出版社: 电子工业出版社
出版日期: 2020-03-01

頁數/字數: /
書度/開本: 16开 釘裝: 平塑

售價:NT$ 594

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內容簡介:
本书是一本介绍半导体集成电路和器件制造技术的专业书籍,在半导体领域享有很高的声誉。本书的范围包括半导体工艺的每个阶段:从原材料的制备到封装、测试和成品运输,以及传统的和现代的工艺。全书提供了详细的插图和实例,每章包含回顾总结和习题,并辅以丰富的术语表。第六版修订了微芯片制造领域的新进展,讨论了用于图形化、掺杂和薄膜步骤的先进工艺和尖端技术,使隐含在复杂的现代半导体制造材料和工艺中的物理、化学和电子的基础知识更易理解。本书的主要特点是避开了复杂的数学问题介绍工艺技术内容;加入了半导体业界的新成果,可以使读者了解工艺技术发展的趋势。
目錄
Contents

1The Semiconductor Industry1

Introduction1

Birth of an Industry1

The Solid-State Era3

Integrated Circuits ICs4

Process and Product Trends5

Moore’s Law6

Decreasing Feature Size6

Increasing Chip and Wafer Size8

Reduction in Defect Density9

Increase in Interconnection Levels 10

The Semiconductor Industry Association Roadmap 10

Chip Cost 11

Industry Organization 11

Stages of Manufacturing 12

Six Decades of Advances in Microchip Fabrication Processes 14

The Nano Era 16

Review Topics 17

References 17

2Properties of Semiconductor Materials and Chemicals19

Introduction 19

Atomic Structure 19

The Bohr Atom 19

The Periodic Table of the Elements 20

Electrical Conduction 23

Conductors 23

Dielectrics and Capacitors 23

Resistors 24

Intrinsic Semiconductors 24

Doped Semiconductors 25

Electron and Hole Conduction 26

Carrier Mobility 28

Semiconductor Production Materials 29

Germanium and Silicon 29

Semiconducting Compounds 29

Silicon Germanium 31

Engineered Substrates 31

Ferroelectric Materials 31

Diamond Semiconductors 32

Process Chemicals 32

Molecules, Compounds, and Mixtures 32

Ions 33

States of Matter 34

Solids, Liquids, and Gases 34

Plasma State 34

Properties of Matter 34

Temperature 34

Density, Specic Gravity, and Vapor Density 35

Pressure and Vacuum 36

Acids, Alkalis, and Solvents 37

Acids and Alkalis 37

Solvents 38

Chemical Purity and Cleanliness 38

Safety Issues 38

The Material Safety Data Sheet 39

Review Topics 39

References 39

3Crystal Growth and Silicon Wafer Preparation 41

Introduction 41

Semiconductor Silicon Preparation 41

Silicon Wafer Preparation Stages 42

Crystalline Materials 42

Unit Cells 43

Poly and Single Crystals 43

Crystal Orientation 44

Crystal Growth 45

Czochralski Method 45

Liquid-Encapsulated Czochralski 47

Float Zone 47

Crystal and Wafer Quality 49

Point Defects 49

Dislocations 50

Growth Defects 50

Wafer Preparation 51

End Cropping 51

Diameter Grinding 51

Crystal Orientation, Conductivity, and Resistivity Check 51

Grinding Orientation Indicators 52

Wafer Slicing 53

Wafer Marking 54

Rough Polish 54

Chemical Mechanical Polishing 55

Backside Processing 55

Double-Sided Polishing 56

Edge Grinding and Polishing 56

Wafer Evaluation 56

Oxidation 57

Packaging 57

Wafer Types and Uses 57

Reclaim Wafers 57

Engineered Wafers Substrates 57

Review Topics 58

References 58

4Overview of Wafer Fabrication and Packaging 59

Introduction 59

Goal of Wafer Fabrication 59

Wafer Terminology 59

Chip Terminology 61

Basic Wafer-Fabrication Operations 63

Layering 63

Patterning 64

Circuit Design 66

Reticle and Masks 68

Doping 69

Heat Treatments 69

Example Fabrication Process 72

Wafer Sort 74

Packaging 75

Summary 75

Review Topics 76

References 76

5Contamination Control 77

Introduction 77

The Problem 77

Contamination-Caused Problems 80

Contamination Sources 81

General Sources 81

Air 81

Clean Air Strategies 82

Cleanroom Workstation Strategy 83

Tunnel or Bay Concept 85

Micro- and Mini-Environments 86

Temperature, Humidity, and Smog 87

Cleanroom Construction 88

Construction Materials 88

Cleanroom Elements 89

Personnel-Generated Contamination 93

Process Water 94

Process Chemicals 96

Equipment 99

Cleanroom Materials and Supplies 99

Cleanroom Maintenance 100

Wafer-Surface Cleaning 100

Particulate Removal 102

Wafer Scrubbers 102

High-Pressure Water Cleaning 103

Organic Residues 103

Inorganic Residues 103

Chemical-Cleaning Solutions 104

General Chemical Cleaning 104

Oxide Layer Removal 105

Room Temperature and Ozonated Chemistries 106

Water Rinsing 108

Drying Techniques 110

Contamination Detection 112

Review Topics 112

References 113

6Productivity and Process Yields 115

Overview 115

Yield Measurement Points 115

Accumulative Wafer-Fabrication Yield 116

Wafer-Fabrication Yield Limiters 117

Number of Process Steps 118

Wafer Breakage and Warping 118

Process Variation 119

Mask Defects 120

Wafer-Sort Yield Factors 120

Wafer Diameter and Edge Die 121

Wafer Diameter and Die Size 122

Wafer Diameter and Crystal Defects 122

Wafer Diameter and Process Variations 123

Die Area and Defect Density 124

Circuit Density and Defect Density 125

Number of Process Steps 125

Feature Size and Defect Size 125

Process Cycle Time 125

Wafer-Sort Yield Formulas 125

Assembly and Final Test Yields 128

Overall Process Yields 128

Review Topics 129

References 130

7Oxidation 131

Introduction 131

Silicon Dioxide Layer Uses 131

Surface Passivation 131

Doping Barrier 132

Surface Dielectric 132

Device Dielectric MOS Gates 133

Device Oxide Thicknesses 134

Thermal Oxidation Mechanisms 134

Influences on the Oxidation Rate137

Thermal Oxidation Methods140

Horizontal Tube Furnaces140

Temperature Control System141

Source Cabinet143

Vertical Tube Furnaces143

Rapid Thermal Processing146

High-Pressure Oxidation149

Oxidant Sources151

Oxidation Processes 154

Preoxidation Wafer Cleaning 154

Postoxidation Evaluation155

Surface Inspection156

Oxide Thickness156

Oxide and Furnace Cleanliness 156

Thermal Nitridation 156

Review Topics157

References157

8The Ten-Step Patterning Process—Surface Preparation to Exposure 161

Introduction161

Overview of the Photomasking Process 162

Ten-Step Process165

Basic Photoresist Chemistry167

Photoresist167

Photoresist Performance Factors169

Resolution Capability169

Adhesion Capability 170

Process Latitude171

Pinholes172

Particle and Contamination Levels173

Step Coverage173

Thermal Flow173

Comparison of Positive and Negative Resists173

Physical Properties of Photoresists175

Solids Content175

Viscosity 175

Surface Tension176

Index of Refraction 176

Storage and Control of Photoresists176

Light and Heat Sensitivity176

Viscosity Sensitivity177

Shelf Life177

Cleanliness177

Photomasking Processes—Surface Preparation to Exposure178

Surface Preparation 178

Particle Removal178

Dehydration Baking 178

Wafer Priming179

Spin Priming180

Vapor Priming180

Photoresist Application Spinning181

The Static Dispense Spin Process181

Dynamic Dispense183

Moving-Arm Dispensing183

Manual Spinners183

Automatic Spinners184

Edge Bead Removal185

Backside Coating185

Soft Bake 185

Convection Ovens186

Manual Hot Plates187

In-Line, Single-Wafer Hot Plates187

Moving-Belt Hot Plates187

Moving-Belt Infrared Ovens188

Microwave Baking188

Vacuum Baking188

Alignment and Exposure189

Alignment and Exposure Systems189

Exposure Sources191

Alignment Criteria191

Aligner Types193

Postexposure Bake196

Advanced Lithography198

Review Topics198

References198

9The Ten-Step Patterning Process—Developing to Final Inspection201

Introduction201

Development201

Positive Resist Development201

Negative Resist Development203

Wet Development Processes203

Dry or Plasma Development206

Hard Bake 207

Hard-Bake Methods207

Hard-Bake

 

 

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